VEM Vacuum Engineering and Materials

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MEMS

Micro-Electro-Mechanical Systems, or MEMS, are micro-structures created using semiconductor fabrication processes. MEMS devices are widely used in consumer, communication, and computer applications. They include gyroscopes, accelerometers, inertial measurement units, pressure sensors, inertial sensors, RF devices, microphones, micro-bolometers, and inkjet heads. VEM is working with many of the leading MEMS suppliers and foundries for both process and packaging solutions.

Evaporation Materials: VEM provides evaporation materials ranging from pure elements to compounds and alloys. We provide our metals in many shapes and sizes from small granules and wire to large pellets to suit any needs. VEM will collaborate with you to provide you with materials to your specifications.

Sputtering Targets: VEM is a leading producer of Sputtering Targets. VEM’s Sputtering Targets are made from an array of high quality metals and precious metals with purities of up to 99.99999%.  We take care to assure that they are durable enough to stand up to any customer’s needs. Our Sputtering Targets are available in a wide array of shapes and sizes on request.

Backing Plates: We provide high quality backing plates made from a number of metals. VEM uses high purity indium bonding on our plates to create a durable bond to a Target. We will design and bond plates to your specifications.