VEM Vacuum Engineering and Materials


Grit Blasting – Deposition Removal

Glass beads are used to remove deposition without base material removal, extending parts life. Parts soft or hard are masked as required.

  • Parts soft masked as required
  • Remove deposition and coatings
  • Texture to roughness specification

Grit Blasting – Texture to Specification

  • SiO2 or SiC grit used to roughen surface to achieve desired roughness

Chemical Clean

VEM uses multiple chemistries to safely remove deposition materials from customer supplied shielding. Chemistries are selected based on the deposited metals and stack configuration. Our chemical process:

  • Helps extend the life of our customers’ high value chamber components
  • Ensures the highest rate of return for customers depositing precious metals