Non-Precious Metal Sputtering Target Reclamation
VEM’s reclamation program recovers high-purity non-precious metals from spent sputtering targets and spent backing plates — reducing your cost of ownership and supporting sustainable fab operations.
Non-Precious Metal Sputtering Target Reclamation
VEM’s reclamation program recovers high-purity non-precious metals from spent sputtering targets and spent backing plates — reducing your cost of ownership and supporting sustainable fab operations.
Streamlined Process, Maximum Yield Recovery
Non-precious metals like Tantalum, Titanium, Copper, Tungsten, Molybdenum represent significant raw material cost in every deposition run. VEM’s reclamation program puts that value back to work.
Process
01 — Ship Your Spent Targets
Package and ship spent non-precious sputtering targets to our Santa Clara, CA facility. We provide packaging guidance and can coordinate pickup for high-volume accounts.
02 — Intake & Assay
Our team receives, weighs, and analytically verifies your material. You receive a full intake report with material weight, identity confirmation, and estimated yield before processing begins.
03 — Settlement & Return
Receive settlement as credit toward new VEM target orders, or cash. Whichever best fits your procurement model.
Accepted Material Forms
VEM’s non-precious reclamation program accepts material in a wide variety of forms common in semiconductor and PVD operations. Unsure if your material qualifies? Contact our team for a no-charge evaluation.
Sputtering Targets
- Spent / eroded planar targets
- Rotary/cylindrical targets
- Bonded target + backing plate assemblies
- Off-spec or failed targets
- Partially used or damaged targets
Shield & Chamber Components
- Coated shield kits & liners
- Wafer rings and dark space shields
- Shutters and aperture plates
- Clamp rings with metal buildup
Particulate & Scrap
- Target erosion flakes & shavings
- Chamber cleaning fallout
- Ingot trim and raw material offcuts
Evaporation Components
- Crucible liners with metal residue
- Planetary tooling fixtures
Unsure if your material qualifies? Contact our team for a no-charge evaluation.
What shield cleaning technologies does VEM utilize?
Lower Cost of Ownership
Recover material value from spent targets to offset the cost of new sputtering target purchases. Turning waste into a meaningful cost-reduction lever for your operation.
Sustainability Goals
Meet internal environmental targets and reduce raw material waste. Reclamation keeps high-purity metals in the supply chain rather than in landfill.
Closed-Loop Processing
VEM handles both reclamation and target resupply. Thus, creating a seamless loop where recovered material can feed directly into new target production.
Quick Turn
Within 7–10 business day, VEM’s team can help identify the material, de-bond the target and verify weight. We do the work and remove another bottleneck in your fab schedule.