worker lowering basket to facilitate metal reclamation process

Precious Metal Reclamation Services for Semiconductor and PVD Manufacturing

At Vacuum Engineering & Materials (VEM), we specialize in the recovery of precious and high-purity metals from a variety of semiconductor and PVD system components. Whether in the form of spent shield kits, evaporation system parts, flakes and shavings, backing plate solutions, or scrap wafers, we help customers recover valuable material.


For semiconductor and thin film manufacturers, precious metals represent a significant investment in both materials and process performance. Over time, valuable deposited materials accumulate on chamber components. Without an effective strategy, these materials can become a source of unnecessary waste and increased operating costs.


With more than 38 years of experience supporting advanced manufacturing industries, VEM provides a practical, closed-loop approach. We help customers maximize material value while minimizing disruption to production operations.


worker lowering basket to facilitate metal reclamation process

Precious Metal Reclamation Services for Semiconductor and PVD Manufacturing


Reclaim precious and high-purity metals from shield kits, evaporation systems, flakes & shavings, plating solutions, wafers, and more.

Best-in-Class Service, Industry-Leading Turn Time

Recovering precious metals is about more than recycling. Effective reclamation programs help manufacturers reduce material loss, improve process economics, and support long-term sustainability goals. VEM works closely with customers to develop reclamation strategies that maximize metal recovery while supporting ongoing production requirements.

Whether you’re managing small R&D volumes or high-throughput fab operations, our engineers can help you get more value from every deposition run.

Benefits of Precious Metal Reclamation

Recover Valuable Materials

Reclaiming precious metals from production components and waste streams helps recover materials that would otherwise be lost during manufacturing operations.

Reduce Material Costs

Recovered metals can help offset replacement material costs and improve overall resource utilization.

Support Sustainability Goals

Reclamation reduces waste generation and promotes responsible material management practices.

Extend Component Value

By combining reclamation and cleaning services, VEM helps customers maximize the useful life of process hardware and shield kits.

Improve Operational Efficiency

Working with a single provider for reclamation, cleaning, inspection, and return logistics helps simplify maintenance workflows.

Reclaimed, Cleaned, and Returned, All in One Place

Unlike traditional precious metal refiners, VEM’s closed-loop approach is designed specifically for semiconductor and PVD manufacturing environments. Customers benefit from material recovery and component restoration services through a single provider, helping reduce turnaround times and simplify vendor management.

Our shield kit cleaning services include:

  • Stripping of metallic build-up
  • Surface cleaning to OEM tolerances
  • Packaging and return logistics

What Metals Can VEM Reclaim?

We reclaim a wide variety of precious and non-precious high-purity materials, including:

Reclaimable Precious Metals:

  • Gold (Au)
  • Platinum (Pt)
  • Palladium (Pd)
  • Iridium (Ir)
  • Ruthenium (Ru)
  • Silver (Ag)

Reclaimable Non-Precious Metals:

  • Tantalum (Ta)
  • Germanium (Ge)

Our reclaim process is tailored to each metal’s unique chemistry and deposition behavior to maximize recovery and purity.

What Forms Does VEM Work With?

VEM can reclaim metals from a wide range of process components and waste forms:

PVD Shield Kits

  • Including wafer rings, shields, shutters, holders, sidewalls, and more

Evaporation System Components

  • Such as planetary tooling, crucible hearths, liners, and deposition surfaces.

Flakes & Shavings

  • From target erosion, chamber cleaning, or collected fallout.

Plating Solutions

  • Expired or spent electroplating baths.

Wafers & Scrap

  • Partial or full wafers, test dies, and reject lots containing recoverable metals.

If you’re unsure whether your material qualifies, our team can evaluate your waste stream and propose a custom solution.

What is VEMs Turnaround Time for Precious Metal Reclamation?

We understand the need to minimize fab downtime. Our typical reclamation turnaround for shield kits is 7–10 business days. Turnaround times may vary depending on material type, volume, and processing requirements.

Industries We Support

VEM’s precious metal reclamation services support a wide range of advanced manufacturing environments, including:

  • Semiconductor manufacturing
  • Thin film deposition
  • Physical Vapor Deposition (PVD)
  • Electronics manufacturing
  • Research and development laboratories
  • Advanced materials manufacturing
  • Vacuum coating operations

Whether supporting prototype development or high-volume production, VEM helps manufacturers recover valuable materials while reducing waste and maximizing resource utilization.

Our Precious Metal Reclamation Process

  1. Material Evaluation

Our team reviews the material type, component condition, and recovery objectives to determine the most effective reclamation approach.

  1. Recovery Method Selection

Appropriate thermal and chemical recovery techniques are selected based on the metal, substrate, and deposited material characteristics.

  1. Precious Metal Recovery

Materials undergo recovery processing designed to maximize reclaim rates while protecting reusable hardware whenever possible.

  1. Cleaning and Inspection

Reusable components may be cleaned and inspected prior to return.

  1. Return and Reuse

Recovered components are prepared for return, helping customers reintroduce qualified hardware into their production process.

What Reclamation Technologies Does VEM Utilize?

VEM uses a blend of thermal spray and chemical recovery technologies to extract the highest possible metal yields while preserving the integrity of reusable components.

Supported Precious Metal Recovery Programs

VEM works with customers to develop custom reclamation programs for recurring shield kit maintenance, production scrap recovery, and component recycling initiatives.

Whether your operation generates occasional reclaimable material or requires an ongoing recovery program, our team can help establish a process that aligns with your production goals, maintenance schedules, and sustainability objectives.

Twin Wire Arc Spray (TWAS) System

Our in-house robotic TWAS system applies a precise aluminum sacrificial layer to shielding components. This layer acts as a barrier, enabling chemical removal of precious metal coatings, eliminating the need for mechanical abrasion and reducing damage to expensive hardware.

Chemical Processing

For flakes, platings, and intermingled thin films, we use selective chemical leaching agents tailored to the material and substrate. This method delivers a higher recovery rate than mechanical-only processes, especially for fine particulate or embedded films.


Whether you’re looking to recover precious metals from shield kits, reclaim valuable materials from process scrap, or establish a long-term recovery program, VEM can help develop a solution tailored to your operation.

Why Choose VEM for Precious Metal Reclamation Services?

For more than 38 years, VEM has supported semiconductor and thin film manufacturers with specialized materials, manufacturing, cleaning, and reclamation services. Unlike traditional refiners that primarily focus on metal recovery, VEM understands the unique challenges associated with PVD equipment, shield kits, deposition hardware, and process materials.

Customers choose VEM because of our:

  • Semiconductor industry expertise
  • Dallas-based reclamation facility
  • Fast turnaround times
  • Closed-loop service model
  • Advanced chemical and thermal recovery capabilities
  • Component cleaning and return services
  • Commitment to maximizing recovery yields

Partner with VEM for Precious Metal Reclamation Services

Recovering valuable materials is an important part of improving manufacturing efficiency, reducing waste, and supporting sustainability objectives. 

With decades of experience serving semiconductor and thin film manufacturers, VEM provides specialized precious metal reclamation services designed to maximize recovery. We also help streamline maintenance operations, and help customers get more value from their production assets.

Contact us today to discuss a custom solution.


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Frequently Asked Questions About Precious Metal Reclamation Services

Precious metal reclamation services recover valuable metals from manufacturing components, production scrap, process hardware, and waste materials so they can be reused, recycled, or returned to the supply chain.

VEM can reclaim gold, platinum, palladium, iridium, ruthenium, and silver, along with select high-purity non-precious metals such as tantalum and germanium.

Precious metals may be recovered from PVD shield kits, evaporation system components, flakes, shavings, plating solutions, wafers, and other production-related materials.

Reclamation helps manufacturers recover valuable materials, reduce waste, improve sustainability efforts, and maximize the value of production assets.

VEM offers a closed-loop solution that combines precious metal recovery with component cleaning, inspection, and return services tailored specifically for semiconductor and PVD manufacturing environments.

Yes. Depending on component condition and application requirements, shield kits may be reclaimed, cleaned, inspected, and returned for reintegration into the manufacturing process.

VEM’s typical turnaround time for shield kit reclamation is approximately 7–10 business days, though timing may vary based on material type and processing requirements.

VEM can evaluate a variety of components, scrap materials, wafers, plating solutions, and process waste streams to determine whether they are suitable candidates for reclamation.

Metals


NON-Precious Metals


Tantalum (Ta)

Hafnium (Hf)

Germanium (Ge)

Titanium (Ti)

Copper (Cu)

Nickel (Ni)

Tungsten (W)

Molybdenum (Mo)

Aluminum (Al)

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