Tantalum
Ta
Tantalum
Data Sheet
Physical Properties
- Melting point: 3017°C
- Density: 16.678 g/cm³
- Thermal Conductivity: 57.5 W/m·K
- Electrical Resistivity: 131µΩ·cm at 20°C
Chemical Properties
- Atomic Number: 73
- Atomic Weight: 180.94 amu
- Crystal Structure: Body Centered Cubic (FCC)
Applications
- Electronics: Diffusion barriers between copper interconnects and silicon. Capacitor electrodes in microelectronics. Gate electrodes in metal-oxide-semiconductor devices.
- Optics: Anti-reflective coatings, optical filters and heat reflecting filters.
- Medical: Utilized in medical implants and devices due to its biocompatibility
- Protective Coatings: Wear-resistant coatings for cutting tools and mechanical components.
- Wear Resistance: Enhances the durability of surfaces exposed to mechanical wear and abrasion.
- Aerospace: Thermal barriers, oxidation-resistant layers, protective coatings for turbine components.
Forms
Sputtering Targets
(any dimension)
Diameter, Rectangular, Delta & Rotatable configurations
Tantalum sputtering target for 200mm PVD system
Evaporation Material
(any dimension)
Pellets, Starter Sources or Wire
Tantalum pellets .250” x .250”
Purity Guide
| Purity | Level | Metallic Impurities Allowed (PPM) |
| (2N) 99% | 99% | 10,000 |
| (2N5) | 99.5% | 5,000 |
| (3N) | 99.9% | 1,000 |
| (3N5) | 99.95% | 500 |
| (4N) | 99.99% | 100 |
| (4N5) | 99.995% | 50 |
| (5N) | 99.999% | 10 |
| (5N5) | 99.9995% | 5 |
| (6N) | 99.9999% | 1 |
Example of a Typical Certificate of Analysis
| Element | PPM Level | Element | PPM Level |
| Cr | 3 | Cu | 5 |
| Fe | 10 | Mn | 1 |
| Mo | 1.5 | Nb | 17 |
| Ni | 6 | Si | 4 |
| Ti | 0.5 | W | 6 |
| Zr | 1 | O | 83 |
| C | 6 | N | 58 |
| H | 2 |