Advanced Surface Treatments

Enhancing Component Performance in Demanding Environments

In thin film deposition and related vacuum processes, chamber components operate under extreme temperatures and conditions that can cause wear, erosion, and contamination. Advanced surface treatments are used to protect these components, extend their lifespan, and improve overall process reliability.

At VEM, advanced surface treatments include Twin Wire Arc Spray (TWAS) and Plasma Spray systems, both of which apply durable protective coatings designed for high-performance applications.

Benefits of Advanced Surface Treatments

• Extended Component Life – Protective coatings reduce erosion and thermal stress, allowing parts to remain in service longer.

• Reduced Downtime – Longer-lasting components minimize unscheduled maintenance and interruptions.

• Improved Process Stability – Clean, treated surfaces support consistent thin film deposition results.

• Lower Operating Costs – Extending the service life of components decreases the frequency of replacements.

Treatment Methods

Twin Wire Arc Spray (TWAS)

Twin Wire Arc Spray is a thermal spray process that uses two consumable wires and an electric arc to apply a metallic coating. This treatment strengthens surfaces, improves resistance to erosion, and enhances thermal performance in vacuum chamber components.

Plasma Spray

Plasma Spray uses a high-energy plasma jet to apply coatings with strong adhesion and excellent durability. This method is particularly suited for creating robust, wear-resistant surfaces that can withstand repeated use in high-vacuum and high-temperature environments.

Applications

Advanced surface treatments are applied to components used across a wide range of industries, including:

• Semiconductors
• Data Storage
• LED Manufacturing
• Advanced Packaging
• Wireless Technologies

These coatings play a key role in ensuring components meet the strict cleanliness and performance requirements of modern vacuum processes.

Quality and Expertise

All services are performed in a controlled, ISO-certified environment with a focus on consistency and reliability. Surface treatments are often integrated with precision cleaning and other preparation steps, ensuring that chamber components are ready for use in demanding production settings.

How Can We Help

To learn more about advanced surface treatments such as Twin Wire Arc Spray and Plasma Spray, or to discuss specific component requirements, contact us for details.